JPH02720U - - Google Patents
Info
- Publication number
- JPH02720U JPH02720U JP7828988U JP7828988U JPH02720U JP H02720 U JPH02720 U JP H02720U JP 7828988 U JP7828988 U JP 7828988U JP 7828988 U JP7828988 U JP 7828988U JP H02720 U JPH02720 U JP H02720U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- ion implantation
- holding jig
- horizontal state
- wafer holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 2
- 239000007943 implant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000005465 channeling Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7828988U JPH02720U (en]) | 1988-06-15 | 1988-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7828988U JPH02720U (en]) | 1988-06-15 | 1988-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02720U true JPH02720U (en]) | 1990-01-05 |
Family
ID=31303225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7828988U Pending JPH02720U (en]) | 1988-06-15 | 1988-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02720U (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002050863A1 (fr) * | 2000-12-19 | 2002-06-27 | Advantest Corporation | Mecanisme de fixation de support d'echantillons |
| JP2003045371A (ja) * | 2001-07-19 | 2003-02-14 | Applied Materials Inc | イオン注入装置の基板支持部材およびイオン注入装置 |
| JP2010015774A (ja) * | 2008-07-02 | 2010-01-21 | Sumco Corp | イオン注入装置 |
| JP2015203140A (ja) * | 2014-04-15 | 2015-11-16 | 日新イオン機器株式会社 | イオン注入装置 |
-
1988
- 1988-06-15 JP JP7828988U patent/JPH02720U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002050863A1 (fr) * | 2000-12-19 | 2002-06-27 | Advantest Corporation | Mecanisme de fixation de support d'echantillons |
| JP2003045371A (ja) * | 2001-07-19 | 2003-02-14 | Applied Materials Inc | イオン注入装置の基板支持部材およびイオン注入装置 |
| JP2010015774A (ja) * | 2008-07-02 | 2010-01-21 | Sumco Corp | イオン注入装置 |
| JP2015203140A (ja) * | 2014-04-15 | 2015-11-16 | 日新イオン機器株式会社 | イオン注入装置 |
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